PTI52600 – Vacuum and Plasma Technologies for Sustainable Processes

Modul
Vacuum and Plasma Technologies for Sustainable Processes
Vacuum and Plasma Technologies for Sustainable Processes
Modulnummer
PTI52600
Version: 1
Fakultät
Physikalische Technik / Informatik
Niveau
Master
Dauer
1 Semester
Turnus
Wintersemester
Modulverantwortliche/-r

Prof. Dr. Stefan Braun
stefan.braun(at)whz.de

Dozent/-in(nen)

Prof. Dr. Stefan Braun
stefan.braun(at)whz.de
Dozent/-in in: "Vacuum and Plasma Technologies for Sustainable Processes"

Prof. Dr. Maik Fröhlich
maik.froehlich(at)whz.de
Dozent/-in in: "Vacuum and Plasma Technologies for Sustainable Processes"

Lehrsprache(n)

Englisch - 100.00%

ECTS-Credits

5.00 Credits

Workload

150 Stunden

Lehrveranstaltungen

4.00 SWS (4.00 SWS Vorlesung)

Selbststudienzeit

90.00 Stunden
40.00 Stunden Vorbereitung Prüfung
50.00 Stunden Selbststudium

Prüfungsvorleistung(en)
Keine
Prüfungsleistung(en)

mündliche Prüfungsleistung
Modulprüfung | Prüfungsdauer: 30 min | Wichtung: 100% | wird in englischer Sprache abgenommen

Lehrinhalte/Gliederung

Plasma Technologies:

  • Plasma Basics
  • Fundamental Processes in Plasmas
  • Plasma Chemical Processes
  • Types of Discharges
  • Plasma Technology for Environment and Sustainability

Vacuum Technologies:

  • Thermodynamic basics: Pressure, Ideal gas, Velocity distribution, Mean free path
  • Roughing pumps: Diaphragm pump, Rotary vane pump, Roots pump
  • High vacuum pumps: Diffusion pump, Turbomolecular pump, Getter pump, Cryogenetic pump
  • Vacuum measurements: Direct and indirect pressure gauges (Bourdon, Baratron, Pirani, Pennig, Bayard-Albert)
  • Introduction to thin film technologies: Physical and chemical vapor deposition (PVD, CVD)
  • PVD: Sputter Deposition (DC Magnetron, RF, Reactive and pulse sputtering, HiPIMS), Vacuum Arc, Puls Laser Deposition
  • CVD: CVD principles (Thermal, Plasma enhanced), Reactor types
Qualifikationsziele

Students have a solid knowledge of vacuum-based technologies for the production of thin films, layer systems and special layer structures. They will gain in-depth knowledge of the necessary process conditions and the atomic processes involved in physical and chemical vapor deposition and layer and structure formation. The students are thus able to establish correlations between process conditions and coating properties and apply them to practical problems.

In addition, the students gains knowledge of plasma-chemical processes and their areas of application in the high-tech and life science sectors. They will have knowledge of the intentional and unintentional generation of particles in plasmas, how this can be prevented or specifically adjusted and in which areas of application this is relevant. The student will acquire in-depth knowledge in the determination and targeted adjustment of plasma parameters using plasma diagnostic methods and the associated optimization of plasma sources and processes. This enables them to contribute to the implementation of new plasma-based processes and applications in the high-tech sector. The student will also be able to independently develop solutions to problems from various relevant specialist areas, carry out experiments and evaluate them in a qualified manner.

Besondere Zulassungsvoraussetzung
Empfohlene Voraussetzungen
Fortsetzungsmöglichkeiten
Literatur

Plasma Technologies:

  • Yu. P. Raizer, „Gas Discharge Physics“, Springer-Verlag, Berlin Heidelberg
  • H. Raether, „Electron avalanches and breakdown in gases“, Butterworths, Washington (D.C.)
  • R. Hippler, H. Kersten, M. Schmidt und K. H. Schoenbach, „Low Temperature Plasmas: Fundamentals, Technologies and Techniques”. 2. Aufl. WILEY–VCH Verlag GmbH & Co. KGaA, Weinheim

Vacuum Technologies:

  • K. Jousten: Handbook of Vacuum Technology, Wiley-VCH
  • D. M. Hata et al.: Introduction to vacuum technology, Milne Open Textbooks
  • H. H. Gadsen et al.: Micro and Nano Fabrication, Springer
  • D. Yang: Thin films - Deposition Methods and Applications, IntechOpen

It is recommended to use the latest edition.

Hinweise

Das Modul wird als Wahlmodul im Masterstudiengang 471 (Advanced Green Engineering and Sustainable Management) angeboten. Aktuell ist es noch nicht im Wahlkatalog enthalten und muss über eines der beiden freien Wahlmodule (PTI50100 oder PTI50200, Elective module for the aquisition of additional competencies) anerkannt werden.